Scanned-Spot-Array EUV Imaging for High-Volume Maskless Lithography

Version 1.6.0.0 (13,8 KB) von Kenneth Johnson
Design data and optical simulation code for maskless EUV lithography system
5.0
(1)
419 Downloads
Aktualisiert 9. Okt 2012

Lizenz anzeigen

This MATLAB program accompanies the following publication:
K. C. Johnson, "Scanned-spot-array extreme ultraviolet imaging for high-volume maskless lithography"
J. Vac. Sci. Technol. B 30, 051606 (2012) [http://dx.doi.org/10.1116/1.4752112]

The program provides optical design data for the Schwarzschild EUV projection optics and for a Schupmann zone-plate microlens doublet, as described in the above publication; and it simulates the system ray-trace performance.

The encapsulated local functions provide a general-purpose ray tracing capability for lenses, mirrors, and diffraction gratings.

Zitieren als

Kenneth Johnson (2025). Scanned-Spot-Array EUV Imaging for High-Volume Maskless Lithography (https://www.mathworks.com/matlabcentral/fileexchange/37634-scanned-spot-array-euv-imaging-for-high-volume-maskless-lithography), MATLAB Central File Exchange. Abgerufen.

Kompatibilität der MATLAB-Version
Erstellt mit R2012a
Kompatibel mit allen Versionen
Plattform-Kompatibilität
Windows macOS Linux
Kategorien
Mehr zu Solar Power finden Sie in Help Center und MATLAB Answers

Community Treasure Hunt

Find the treasures in MATLAB Central and discover how the community can help you!

Start Hunting!

Version Veröffentlicht Versionshinweise
1.6.0.0

Architectural code revisions; no algorithm changes.
1.4.0.0

Code comments revised.
Publication citation revised.
1.2.0.0

Description is updated with link to published paper.
1.0.0.0