Scanned-Spot-Array EUV Imaging for High-Volume Maskless Lithography

Design data and optical simulation code for maskless EUV lithography system

Version 1.6.0.0 (13,8 KB)
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9. Okt 2012

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This MATLAB program accompanies the following publication:
K. C. Johnson, "Scanned-spot-array extreme ultraviolet imaging for high-volume maskless lithography"
J. Vac. Sci. Technol. B 30, 051606 (2012) [http://dx.doi.org/10.1116/1.4752112]

The program provides optical design data for the Schwarzschild EUV projection optics and for a Schupmann zone-plate microlens doublet, as described in the above publication; and it simulates the system ray-trace performance.

The encapsulated local functions provide a general-purpose ray tracing capability for lenses, mirrors, and diffraction gratings.

Zitieren als

Kenneth Johnson (2026). Scanned-Spot-Array EUV Imaging for High-Volume Maskless Lithography (https://de.mathworks.com/matlabcentral/fileexchange/37634-scanned-spot-array-euv-imaging-for-high-volume-maskless-lithography), MATLAB Central File Exchange. Abgerufen .

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Version Veröffentlicht Versionshinweise
1.6.0.0

Architectural code revisions; no algorithm changes.
1.4.0.0

Code comments revised.
Publication citation revised.
1.2.0.0

Description is updated with link to published paper.
1.0.0.0