Found error "Undefined function 'minus' for input arguments of type 'cell'. Error in @(x,y)1./deff-w(x,y) "
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I tried the integral on w(x,y) equation and it shows the above error..Please help!
a=19.38e-6;
L=2*a;
Cr=3.45;
Cb=4.06;
Cs=1.994;
A=150.454e3;
B=0.0535;
C=12.53e-9;
d0=1e-6
sig=290e6;
t=2.4e-6;
Deff=((A*C)-B^2)/A
k=((Cr*t*sig)/a^2)+((Cb*12*Deff)/a^4) % stifness in pa
area=L*L;
v=0.23;
E=170e9; % young's modulus
Q=E/(1-v^2);
E0=8.854e-12;
K=k*area; % stiffness in N
d0=0:0.1e-6:1e-6 % air gap
Vpi=sqrt((8*(d0.*d0.*d0).*K)/(27.*E0.*area));
figure(1)
plot(d0,Vpi);
xlabel('Gap')
ylabel('V-pullin')
Vb=12;
v=0.23;
di=0.2e-6; % insulator thickness
Erm=11.68; %dielectric constant of polysilicon
Eri=8; % dielectric constant of insulator
Fs=(1-0.271*v)/(1-v)
deff =(t/Erm)+(di/Eri)+d0
Pext=0;
X1=(Cs*Fs*(Q*t/a^4))
X2=0
X3=(((Cr.*t.*sig)./(a.^2))+((Cb.*12.*Deff)./(a.^4))-((E0.*Vb.^2)./2.*a)).*((4.*a)./deff.^3)+((0.394).*(a.^0.25)./(deff.^2.25))
X4=-(Pext+((E0.*Vb.^2)./2.*a)).*((2.*a)./deff.^2)+((0.315).*(a.^0.25)./(deff.^1.25))
W0= roots([X1 X2 X3 X4])
for n=1:length(W0)
if((imag(W0(n)==0)))
W0=W0(n);
end
end
Vb= 0:5:50
P1=((E0.*Vb.^2)./2.*a).*(((2.*a)./d0.^2)+((.265.*((2.*a).^0.25))./(d0.^1.25)))
P2= ((E0.*Vb.^2)./2.*a).*((4.*a./d0.^3)+((0.33125.*((2.*a).^(0.25)))./d0.^2.25))
W=abs(W0);
W1=W(1:2:end,:)
W1(12,:)=[];
W2= W1.'
P3= P2.*W2;
Pelec = P1+P3
figure(2)
plot(Pelec,Vb);
xlabel('Electrostatic Pressure')
ylabel('Bias Voltage')
figure(3)
plot(Vb,W2);
xlabel('Bias Voltage')
ylabel('Center Deflection')
syms w(x,y)
c(1) = 1
c(2) = 0.6832
c(3) = 0.3105
syms x y
S = sum(c(1:3).*(((x^2+y^2)/a^2).^n-1),1,3)
symvar(S,2)
w(x,y) = W0.*(1-x.^2/a.^2).^2 .*(1-y.^2/a.^2).^2 .* S;
wu = w(x,y)
fun = @(x,y) 1./deff - w(x,y); %error
q = integral2(fun,0,L,0,1e-6);
Cdeform= E0.*q;
Cff= (0.385.*deff)./a + 1.06.*((1./L).*deff).^(0.75) + (0.53./a).*(1e-6.*deff).^(0.5)
Cap = Cdeform.*(1+Cff)
figure(4)
plot(Vb,Cap)
xlabel('Bias Voltage')
ylabel('Capacitance')
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